Fluoroflow-HSA Pleated Membrane Filter Cartridge | All-fluoropolymer PTFE for chemical resistance in aggressive applications

The Fluoroflow®-HSA filter cartridge provides good flow rates and on-stream life. The enhanced pleating provides more than 40% more surface area than our standard Fluoroflow filter cartridge. This results in increased bath turnover and longer filter lifetime demanded by today’s fabs. The all fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.
Features/Benefits
• Increased filtration area for longer life
• Higher flow rates for increased bath turn over
• Wet-pack option for quick installation
• Ultraclean wet-pack option for absolute cleanliness
• All-fluoropolymer for most maximum chemical resistance
• 100% integrity tested for consistent quality

Applications
• Wet etch and clean filtration for:
–  Phosphoric acid
–  Sulfuric acid
–  Hydrofluoric acid
–  Nitric acid
–  Piranha
–  SC1, SC2
–  NMP-based solvents
• Other high temperature or ozonated process filtration